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| Date | 6/30/2022 | 3/31/2022 | 12/31/2021 | 9/30/2021 | 6/30/2021 | 3/31/2021 | 12/31/2020 | 9/30/2020 | 6/30/2020 | 3/31/2020 | 12/31/2019 | 9/30/2019 | 6/30/2019 | 3/31/2019 | 12/31/2018 | 9/30/2018 | 6/30/2018 | 3/31/2018 | 12/31/2017 | 9/30/2017 | 6/30/2017 | 3/31/2017 | 12/31/2016 | 9/30/2016 | 6/30/2016 | 3/31/2016 | 12/31/2015 | 9/30/2015 | 6/30/2015 | 3/31/2015 | 12/31/2014 | 9/30/2014 | 6/30/2014 | 3/31/2014 | 12/31/2013 | 12/31/2012 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Cash and Cash Equivalents | $292,837,000.00 | $699,384,000.00 | $757,509,000.00 | $903,761,000.00 | $711,285,000.00 | $624,330,000.00 | $422,766,000.00 | $347,148,000.00 | $266,400,000.00 | $174,889,000.00 | $346,248,000.00 | $300,619,000.00 | $232,607,000.00 | $258,843,000.00 | $268,947,000.00 | $191,468,000.00 | $200,645,000.00 | $190,088,000.00 | $182,103,000.00 | $192,427,000.00 | $187,491,000.00 | $184,146,000.00 | $142,098,000.00 | $225,082,000.00 | $210,863,000.00 | $183,290,000.00 | $148,431,000.00 | $144,590,000.00 | $138,685,000.00 | $252,558,000.00 | $167,540,000.00 | $159,737,000.00 | -- | -- | $213,076,000.00 | $151,691,000.00 |
| Accounts Receivable Net Current | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Inventory | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Prepaid Expenses and Other Current Assets | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Total Current Assets | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Property Plant and Equipement | $58,482,000.00 | $62,168,000.00 | $63,708,000.00 | $65,140,000.00 | $65,442,000.00 | $66,115,000.00 | $70,685,000.00 | $69,887,000.00 | $67,229,000.00 | $66,798,000.00 | $66,790,000.00 | $67,175,000.00 | $59,690,000.00 | $60,327,000.00 | $41,717,000.00 | $18,970,000.00 | $19,049,000.00 | $18,605,000.00 | $18,477,000.00 | $18,273,000.00 | $18,240,000.00 | $18,138,000.00 | $18,340,000.00 | $17,811,000.00 | $17,821,000.00 | $18,121,000.00 | $18,471,000.00 | $18,838,000.00 | -- | -- | $10,969,000.00 | -- | -- | -- | -- | -- |
| Intangible Assets Net | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Goodwill | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,642,000.00 | $223,125,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | $39,389,000.00 | -- | -- | $11,144,000.00 | -- | -- | -- | $10,999,000.00 | -- |
| Other Assets | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Total Assets | $6,731,764,000.00 | $7,149,363,000.00 | $7,104,954,000.00 | $6,759,761,000.00 | $6,508,667,000.00 | $6,430,990,000.00 | $6,050,128,000.00 | $5,967,751,000.00 | $5,836,881,000.00 | $5,002,429,000.00 | $4,992,654,000.00 | $4,905,840,000.00 | $4,794,211,000.00 | $4,768,802,000.00 | $4,655,249,000.00 | $3,035,539,000.00 | $2,966,426,000.00 | $2,886,484,000.00 | $2,860,231,000.00 | $2,813,434,000.00 | $2,724,716,000.00 | $2,592,330,000.00 | $2,450,948,000.00 | $2,461,902,000.00 | $2,367,581,000.00 | $2,210,707,000.00 | $2,084,579,000.00 | $2,012,350,000.00 | -- | -- | $1,280,008,000.00 | -- | -- | -- | -- | -- |
| Accounts Payable | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Accrued Liabilities | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Total Current Liabilities | $6,026,435,000.00 | $6,397,423,000.00 | $6,288,486,000.00 | $5,961,169,000.00 | $5,719,517,000.00 | $5,670,453,000.00 | $5,291,459,000.00 | $5,214,698,000.00 | $5,100,738,000.00 | $4,295,836,000.00 | $4,282,789,000.00 | $4,199,532,000.00 | $4,089,510,000.00 | $4,065,025,000.00 | $3,952,265,000.00 | $2,707,408,000.00 | $2,646,538,000.00 | $2,574,496,000.00 | $2,553,366,000.00 | $2,510,707,000.00 | $2,426,257,000.00 | $2,303,200,000.00 | $2,171,131,000.00 | $2,180,807,000.00 | $2,091,330,000.00 | $1,944,414,000.00 | $1,826,089,000.00 | $1,816,307,000.00 | -- | -- | $1,148,230,000.00 | -- | -- | -- | -- | -- |
| Long Term Debt | -- | -- | -- | -- | -- | -- | $15,569,000.00 | -- | -- | -- | $569,000.00 | -- | -- | -- | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $569,000.00 | $28,069,000.00 | -- | -- | -- | -- | -- | -- | -- | -- |
| Additional Paid-in Capital | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Accumulated Other Comprehensive Loss | $-115,467,000.00 | $-63,618,000.00 | $18,242,000.00 | $22,460,000.00 | $30,794,000.00 | $24,213,000.00 | $34,431,000.00 | $29,591,000.00 | $27,944,000.00 | $7,486,000.00 | $4,900,000.00 | $6,494,000.00 | $4,233,000.00 | $3,015,000.00 | $-2,888,000.00 | $-5,996,000.00 | $-4,207,000.00 | $-3,607,000.00 | $336,000.00 | $923,000.00 | $444,000.00 | $-2,274,000.00 | $-3,052,000.00 | $5,350,000.00 | $6,850,000.00 | $2,799,000.00 | $2,017,000.00 | $1,319,000.00 | -- | -- | $549,000.00 | -- | -- | -- | -- | -- |
| Accumulated Deficit | $296,477,000.00 | $282,896,000.00 | $267,092,000.00 | $247,966,000.00 | $231,333,000.00 | $210,834,000.00 | $195,236,000.00 | $186,866,000.00 | $172,723,000.00 | $164,858,000.00 | $163,375,000.00 | $149,389,000.00 | $137,342,000.00 | $123,094,000.00 | $112,131,000.00 | $98,968,000.00 | $90,089,000.00 | $82,533,000.00 | $74,894,000.00 | $71,690,000.00 | $68,704,000.00 | $63,309,000.00 | $57,262,000.00 | $51,491,000.00 | $46,020,000.00 | $40,766,000.00 | $34,411,000.00 | $30,199,000.00 | -- | -- | $19,184,000.00 | -- | -- | -- | -- | -- |
| Total Stockholders' Equity | $705,329,000.00 | $751,940,000.00 | $816,468,000.00 | $798,592,000.00 | $789,150,000.00 | $760,537,000.00 | $758,669,000.00 | $753,053,000.00 | $736,143,000.00 | $706,593,000.00 | $709,865,000.00 | $706,308,000.00 | $704,701,000.00 | $703,777,000.00 | $702,984,000.00 | $328,131,000.00 | $319,888,000.00 | $311,988,000.00 | $306,865,000.00 | $302,727,000.00 | $298,459,000.00 | $289,130,000.00 | $279,817,000.00 | $281,095,000.00 | $276,251,000.00 | $266,293,000.00 | $258,490,000.00 | $196,043,000.00 | $201,830,000.00 | $199,024,000.00 | $131,778,000.00 | $118,389,000.00 | -- | -- | $109,736,000.00 | $68,084,000.00 |
| Controlling Interest in Subsidiaries | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Total Liabilities and Equity | $6,731,764,000.00 | $7,149,363,000.00 | $7,104,954,000.00 | $6,759,761,000.00 | $6,508,667,000.00 | $6,430,990,000.00 | $6,050,128,000.00 | $5,967,751,000.00 | $5,836,881,000.00 | $5,002,429,000.00 | $4,992,654,000.00 | $4,905,840,000.00 | $4,794,211,000.00 | $4,768,802,000.00 | $4,655,249,000.00 | $3,035,539,000.00 | $2,966,426,000.00 | $2,886,484,000.00 | $2,860,231,000.00 | $2,813,434,000.00 | $2,724,716,000.00 | $2,592,330,000.00 | $2,450,948,000.00 | $2,461,902,000.00 | $2,367,581,000.00 | $2,210,707,000.00 | $2,084,579,000.00 | $2,012,350,000.00 | -- | -- | $1,280,008,000.00 | -- | -- | -- | -- | -- |
| Date | 6/30/2022 | 3/31/2022 | 12/31/2021 | 9/30/2021 | 6/30/2021 | 3/31/2021 | 12/31/2020 | 9/30/2020 | 6/30/2020 | 3/31/2020 | 12/31/2019 | 9/30/2019 | 6/30/2019 | 3/31/2019 | 12/31/2018 | 9/30/2018 | 6/30/2018 | 3/31/2018 | 12/31/2017 | 9/30/2017 | 6/30/2017 | 3/31/2017 | 12/31/2016 | 9/30/2016 | 6/30/2016 | 3/31/2016 | 12/31/2015 | 9/30/2015 | 6/30/2015 | 3/31/2015 | 12/31/2014 | 9/30/2014 | 6/30/2014 | 3/31/2014 | 12/31/2013 | 12/31/2012 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Total Revenues | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Cost of Revenues | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Gross Profit | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Research and Development | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Selling, General, and Administrative | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Total Operating Expenses | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Loss from Operations | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Loss Before Income Taxes | $42,998,000.00 | $22,859,000.00 | $99,894,000.00 | $73,503,000.00 | $49,829,000.00 | $21,876,000.00 | $55,971,000.00 | $36,167,000.00 | $11,961,000.00 | $4,359,000.00 | $66,386,000.00 | $48,824,000.00 | $33,704,000.00 | $15,775,000.00 | $45,257,000.00 | $10,800,000.00 | $9,130,000.00 | $9,165,000.00 | $26,379,000.00 | $18,566,000.00 | $14,693,000.00 | $7,577,000.00 | $32,405,000.00 | $24,592,000.00 | $7,593,000.00 | $9,425,000.00 | $23,561,000.00 | $17,383,000.00 | $11,206,000.00 | $5,367,000.00 | $13,833,000.00 | $10,500,000.00 | -- | -- | $10,692,000.00 | -- |
| Earnings Per Share Basic | $1.72 | $0.92 | $4.04 | $2.97 | $2.03 | $0.89 | $0.78 | $0.79 | $0.49 | $0.17 | $2.50 | $0.57 | $1.25 | $0.58 | $2.41 | $0.66 | $1.15 | $0.58 | $0.24 | $1.10 | $0.41 | $0.46 | $1.78 | $1.33 | $0.90 | $0.49 | $1.45 | $1.12 | $0.37 | $0.34 | $1.29 | $0.29 | $0.33 | $0.34 | $1.25 | -- |
| Weighted Average Shares Basic | 20,360,000 | 20,363,000 | 20,206,000 | 20,221,000 | 20,171,000 | 20,140,000 | 20,415,000 | 20,421,000 | 20,413,000 | 20,411,000 | 21,152,000 | 21,321,000 | 21,257,000 | 21,733,000 | 15,485,000 | 13,320,000 | 13,327,000 | 13,262,000 | 13,125,000 | 13,104,000 | 13,073,000 | 13,021,000 | 12,873,000 | 12,860,000 | 12,849,000 | 12,840,000 | 10,470,000 | 9,823,000 | 9,825 | 9,823,000 | 6,978,000 | 6,979,000 | -- | -- | 5,450,000 | -- |
| Earnings Per Share Diluted | $1.71 | $0.91 | $4.01 | $2.95 | $2.01 | $0.89 | $0.77 | $1.44 | $0.48 | $0.17 | $0.67 | $1.81 | $1.24 | $0.58 | $2.37 | $1.77 | $1.12 | $0.57 | $0.24 | $0.22 | $0.85 | $0.45 | $1.75 | $0.42 | $0.40 | $0.49 | $0.33 | $1.10 | $0.36 | $0.33 | $0.32 | $0.94 | $0.33 | $0.33 | $1.22 | -- |
| Weighted Average Shares Diluted | 20,522,000 | 20,526,000 | 20,355,000 | 20,369,000 | 20,359,000 | 20,342,000 | 20,546,000 | 20,532,000 | 20,572,000 | 20,690,000 | 21,424,000 | 21,591,000 | 21,780,000 | 22,040,000 | 15,773,000 | 13,637,000 | 13,588,000 | 13,542,000 | 13,458,000 | 13,445,000 | 13,425,000 | 13,377,000 | 13,074,000 | 13,038,000 | 13,003,000 | 12,967,000 | 10,654,000 | 10,001,000 | 10,001 | 9,999,000 | 7,142,000 | 7,154,000 | -- | -- | 5,621,000 | -- |
| Common Stock Shares Authorized | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 80,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | 40,000,000 | -- | -- | 40,000,000 | -- | -- | -- | -- | -- |
| Common Stock Shares Outstanding | 20,154,284 | 20,378,116 | 20,337,220 | 20,218,175 | 20,212,534 | 20,182,971 | 20,208,323 | 20,444,630 | 20,430,836 | 20,355,120 | 20,523,816 | 20,736,779 | 21,147,179 | 21,483,972 | 21,937,740 | 13,396,703 | 13,340,919 | 13,302,462 | 13,226,826 | 13,170,729 | 13,153,053 | 13,080,442 | 12,958,341 | 12,905,068 | 12,869,410 | 12,844,752 | 12,812,985 | 9,823,025 | -- | -- | 7,477,309 | -- | -- | -- | -- | -- |
| Common Stock Value | $20,154,000.00 | $20,378,000.00 | $20,337,000.00 | $20,218,000.00 | $20,213,000.00 | $20,183,000.00 | $20,208,000.00 | $20,445,000.00 | $20,431,000.00 | $20,355,000.00 | $20,524,000.00 | $20,737,000.00 | $21,147,000.00 | $21,484,000.00 | $21,938,000.00 | $13,397,000.00 | $13,341,000.00 | $13,302,000.00 | $13,227,000.00 | $13,171,000.00 | $13,153,000.00 | $13,080,000.00 | $12,958,000.00 | $12,905,000.00 | $12,869,000.00 | $12,845,000.00 | $12,815,000.00 | $9,825,000.00 | -- | -- | $7,477,000.00 | -- | -- | -- | -- | -- |
| Common Stock Par Or Stated Value Per Share | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | -- | -- | $1.00 | -- | -- | -- | -- | -- |
| Payments Of Dividends Common Stock | $5,709,000.00 | $2,853,000.00 | $9,697,000.00 | $7,265,000.00 | $4,838,000.00 | $2,412,000.00 | $8,165,000.00 | $6,102,000.00 | $4,075,000.00 | $2,033,000.00 | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Preferred Stock Shares Authorized | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | 1,000,000 | -- | -- | -- | -- | -- | -- | -- | -- |
| Preferred Stock Shares Outstanding | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Preferred Stock Value | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |
| Preferred Stock Par Or Stated Value Per Share | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | $1.00 | -- | -- | -- | -- | -- | -- | -- | -- |
| Share Price | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- | -- |